• Acta Physica Sinica
  • Vol. 69, Issue 6, 068801-1 (2020)
Ya-Zhou Wang1, Li Ma1、*, Quan Yang1, Song-Chao Geng1, Yi-Ni Lin1, Tao Chen2、*, and Li-Ning Sun2
Author Affiliations
  • 1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
  • 2Robotics and Microsystems Center, Soochow University, Suzhou 215021, China
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    DOI: 10.7498/aps.69.20191298 Cite this Article
    Ya-Zhou Wang, Li Ma, Quan Yang, Song-Chao Geng, Yi-Ni Lin, Tao Chen, Li-Ning Sun. Length-controllable picking method and conductivity analysis of carbon nanotubes[J]. Acta Physica Sinica, 2020, 69(6): 068801-1 Copy Citation Text show less
    Micro-nano manipulation system: (a) Micro-nano manipulation stage; (b) AFM probe; (c) tungsten probe; (d) CNTs sample.
    Fig. 1. Micro-nano manipulation system: (a) Micro-nano manipulation stage; (b) AFM probe; (c) tungsten probe; (d) CNTs sample.
    Schematic diagram of mechanics during contact.
    Fig. 2. Schematic diagram of mechanics during contact.
    Horizontal contact of AFM probe and CNT.
    Fig. 3. Horizontal contact of AFM probe and CNT.
    Circuit for CNT cutting and conductivity measurement.
    Fig. 4. Circuit for CNT cutting and conductivity measurement.
    Bending deformation of CNT with same L1 (15 μm) and different L3: (a), (d) L3 = 4.10 μm; (b), (e) L3 = 6.41 μm; (c), (f) L3 = 8.24 μm.
    Fig. 5. Bending deformation of CNT with same L1 (15 μm) and different L3: (a), (d) L3 = 4.10 μm; (b), (e) L3 = 6.41 μm; (c), (f) L3 = 8.24 μm.
    Position of CNTs and probes.
    Fig. 6. Position of CNTs and probes.
    Stretching of CNT with AFM probe
    Fig. 7. Stretching of CNT with AFM probe
    Contact detection and position judgment.
    Fig. 8. Contact detection and position judgment.
    Cutting process: (a) Contact of probes and CNT; (b) CNT’s breakdown.
    Fig. 9. Cutting process: (a) Contact of probes and CNT; (b) CNT’s breakdown.
    I-V data of CNT and fitting curve.
    Fig. 10. I-V data of CNT and fitting curve.
    I-V data of CNT bundle and fitting curves.
    Fig. 11. I-V data of CNT bundle and fitting curves.
    性能参数取值
    粗定位运动范围/mm$10 \times 10 \times 5$
    最大运动速度/mm·s–1> 3
    最小运动步长/nm< 100
    精定位运动范围/μm$20$
    最大运动速度/μm·s–1$ > 45$
    开环控制分辨率/nm0.1
    闭环控制分辨率/nm1
    精度/nm5
    Table 1. Performance parameters of micro-nano operating unit.
    Ya-Zhou Wang, Li Ma, Quan Yang, Song-Chao Geng, Yi-Ni Lin, Tao Chen, Li-Ning Sun. Length-controllable picking method and conductivity analysis of carbon nanotubes[J]. Acta Physica Sinica, 2020, 69(6): 068801-1
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