Yu Yinshan, You Libing, Liang Xu, Fang Xiaodong. Progress of Excimer Lasers Technology[J]. Chinese Journal of Lasers, 2010, 37(9): 2253
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The fundamental characteristics of excimer are introduced briefly and the historical development of excimer lasers is reviewed.The progress of excimer technology especially for discharge pumped excimer lasers is presented detailedly.The key technologies recently employed to improve the performance of excimer lasers for lithography are analyzed.The applications of discharge pumped excimer lasers in industry,medicine and scientific research are also discussed.