Full field 3D rebuilding method in dynamic MEMS characterization

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 33 >Issue 9 >Page 75 > Article

Opto-Electronic Engineering
Vol. 33, Issue 9, 75 (2006)

Full field 3D rebuilding method in dynamic MEMS characterization

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Full field 3D rebuilding method in dynamic MEMS characterization[J]. Opto-Electronic Engineering, 2006, 33(9): 75 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Full field 3D rebuilding method in dynamic MEMS characterization[J]. Opto-Electronic Engineering, 2006, 33(9): 75

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