We experimentally demonstrate for the first time an active all-optical ultrafast modulation of electromagnetically induced transparency-like effect in a hybrid device of sapphire/Si/metamaterial. From numerical simulations, it can be deducted that the tuning process is attributed to the coupling between the dark mode existing in split-ring resonators and the bright mode existing in cut wire resonators. The transmission amplitude modulation is accompanied by the slow-light effect. In addition, the ultrafast formation process is measured to be as fast as 2 ps. This work should make an important contribution to novel chip-scale photonic devices and terahertz communications.