• Chinese Journal of Lasers
  • Vol. 39, Issue 2, 216001 (2012)
Zhang Junwei1、2、*, Chen Wei1, Zhou Yi1, Chen Liangming2, Wang Xiao2, Zhou Hai2, and Lin Donghui2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201239.0216001 Cite this Article Set citation alerts
    Zhang Junwei, Chen Wei, Zhou Yi, Chen Liangming, Wang Xiao, Zhou Hai, Lin Donghui. Design and Demonstration of High Stability Array Tiled Grating Frame[J]. Chinese Journal of Lasers, 2012, 39(2): 216001 Copy Citation Text show less

    Abstract

    Tiled grating is one of effective the ways to solve the problem of grating aperture limit and the difficulties of tiled grating are the adjustment of sub-aperture grating and stability. Two classes of macro and micro drive modes are adopted to achieve the precision adjustment of sub-aperture gratings. A new tiled grating frame is designed to increase the stability of tiled grating frame. In the tiled grating frame, an integrated support structure is adopted to increase the natural frequency of the tiled grating, and flexible hinges are adopted instead of springs to increase the joint stiffness between the sub-aperture grating and the support frame. The experiment indicates that the tiled grating can keep in stability for more than one hour and the relative displacement standard deviation is 35.7 nm between sub-aperture gratings, which can satisfy the design requirement.
    Zhang Junwei, Chen Wei, Zhou Yi, Chen Liangming, Wang Xiao, Zhou Hai, Lin Donghui. Design and Demonstration of High Stability Array Tiled Grating Frame[J]. Chinese Journal of Lasers, 2012, 39(2): 216001
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