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    Journals >INFRARED >Volume 41 >Issue 6 >Page 7 > Article
    • INFRARED
    • Vol. 41, Issue 6, 7 (2020)
    Study on Surface Treatment Method of InSb Focal Plane Device After Backside Thinning
    Yu XIAO, Jia-fa LI, Shu-yan WANG, Ling-xia CAO, and Hai-yan LI
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    DOI: 10.3969/j.issn.1672-8785.2020.06.002 Cite this Article
    XIAO Yu, LI Jia-fa, WANG Shu-yan, CAO Ling-xia, LI Hai-yan. Study on Surface Treatment Method of InSb Focal Plane Device After Backside Thinning[J]. INFRARED, 2020, 41(6): 7 Copy Citation Text show less
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    XIAO Yu, LI Jia-fa, WANG Shu-yan, CAO Ling-xia, LI Hai-yan. Study on Surface Treatment Method of InSb Focal Plane Device After Backside Thinning[J]. INFRARED, 2020, 41(6): 7
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