LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Photonica Sinica >Volume 31 >Issue 5 >Page 592 > Article

Acta Photonica Sinica
Vol. 31, Issue 5, 592 (2002)

LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM[J]. Acta Photonica Sinica, 2002, 31(5): 592 Copy Citation Text

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References

[2] Büchner H,Jger G.Interferometrisches Meβverfahren zur berührungslosen und quasi-punktfrmigen Antastung von Meβoberflchen.Technisches Messen,1992,59(2):43～47

[3] Jger G.Lichtwellenleitergekoppeltes interferenzoptisches Wegmeβsystem.Technisches Messen,1990,57(1):204～206

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM[J]. Acta Photonica Sinica, 2002, 31(5): 592

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