• Photonics Research
  • Vol. 11, Issue 7, 1196 (2023)
Hyeong-Soon Jang1、2, Donghwa Lee1、3, Hyungjun Heo1, Yong-Su Kim1、3, Hyang-Tag Lim1、3, Seung-Woo Jeon1, Sung Moon1、3, Sangin Kim2, Sang-Wook Han1、3, and Hojoong Jung1、2、*
Author Affiliations
  • 1Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea
  • 2Department of Electrical and Computer Engineering, Ajou University, Suwon 16499, Republic of Korea
  • 3Division of Nano and Information Technology, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea
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    DOI: 10.1364/PRJ.461723 Cite this Article Set citation alerts
    Hyeong-Soon Jang, Donghwa Lee, Hyungjun Heo, Yong-Su Kim, Hyang-Tag Lim, Seung-Woo Jeon, Sung Moon, Sangin Kim, Sang-Wook Han, Hojoong Jung. Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits[J]. Photonics Research, 2023, 11(7): 1196 Copy Citation Text show less

    Abstract

    We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride (AlN) on insulator. On-chip AlN waveguide directional couplers, which are one of the most important components in quantum photonics, are fabricated and show the output power splitting ratios from 50:50 to 99:1. Polarization beam splitters with an extinction ratio of more than 10 dB are also realized from the AlN directional couplers. Using the fabricated AlN waveguide beam splitters, we observe Hong–Ou–Mandel interference with a visibility of 91.7%±5.66%.
    DtTE=λ2ΔneffTE,

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    DtTM=λ2ΔneffTM,

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    DPBS=nDtTE=(n+m)DtTM,for  n=1,2,3,m=1,3,5

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    ΔDt=nDtTE(n+1)DtTMDtTM,for  n=1,2,3

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    Hyeong-Soon Jang, Donghwa Lee, Hyungjun Heo, Yong-Su Kim, Hyang-Tag Lim, Seung-Woo Jeon, Sung Moon, Sangin Kim, Sang-Wook Han, Hojoong Jung. Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits[J]. Photonics Research, 2023, 11(7): 1196
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