• Journal of Infrared and Millimeter Waves
  • Vol. 38, Issue 3, 325 (2019)
XU Chao1、2, SUN Shi-Wen1、2, YANG Jian-Rong1、2, DONG Jing-Tao3, and ZHAO Jian-Hua3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2019.03.012 Cite this Article
    XU Chao, SUN Shi-Wen, YANG Jian-Rong, DONG Jing-Tao, ZHAO Jian-Hua. Inspection of CdZnTe materials by infrared photo-thermal absorption imaging[J]. Journal of Infrared and Millimeter Waves, 2019, 38(3): 325 Copy Citation Text show less

    Abstract

    Infrared photo-thermal absorption effect was used extensively in detecting the micro-defects in semiconductor materials (silicon wafers) as a nondestructive and non-contact technology. This effect was adopted initially to detect the structural characteristic of the defects in CdZnTe (CZT) crystal and images with obvious coherent fringes were obtained, which were investigated systemically. It was confirmed that the coherent fringes of the Infrared photo-thermal absorption images of CZT wafers come from the interference of incident light relative to parameters of incident light, wafer thickness, thermal conductivity and band gap of materials. Finally, the micro-defects of CZT materials and their distribution along depth direction were obtained by optimizing the test conditions.
    XU Chao, SUN Shi-Wen, YANG Jian-Rong, DONG Jing-Tao, ZHAO Jian-Hua. Inspection of CdZnTe materials by infrared photo-thermal absorption imaging[J]. Journal of Infrared and Millimeter Waves, 2019, 38(3): 325
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