• Journal of Synthetic Crystals
  • Vol. 52, Issue 9, 1641 (2023)
WANG Liguang1,*, RUI Yang1, SHENG Wang2, MA Yinshuang1..., MA Cheng1, CHEN Weinan2, ZOU Qipeng2, DU Pengxuan3, HUANG Liuqing2,4 and LUO Xuetao2,4|Show fewer author(s)
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  • 4[in Chinese]
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    WANG Liguang, RUI Yang, SHENG Wang, MA Yinshuang, MA Cheng, CHEN Weinan, ZOU Qipeng, DU Pengxuan, HUANG Liuqing, LUO Xuetao. Influence Mechanism of Crucible Rotation Rates on the Flow Field and Oxygen Concentration of the Semiconductor-Grade Czochralski Monocrystalline Silicon Melt under Transverse Magnetic Field[J]. Journal of Synthetic Crystals, 2023, 52(9): 1641 Copy Citation Text show less
    References

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    [18] NGUYEN T H T, CHEN J C, HU C, et al. Effects of crystal-crucible iso-rotation and a balanced/unbalanced cusp magnetic field on the heat, flow, and oxygen transport in a Czochralski silicon melt[J]. Journal of Crystal Growth, 2020, 531: 125373.

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    [21] LI T, ZHAO L, LV G Q, et al. Thermodynamic analysis of dissolved oxygen in a silicon melt and the effect of processing parameters on the oxygen distribution in single-crystal silicon during Czochralski growth[J]. Silicon, 2023, 15(2): 1049-1062.

    WANG Liguang, RUI Yang, SHENG Wang, MA Yinshuang, MA Cheng, CHEN Weinan, ZOU Qipeng, DU Pengxuan, HUANG Liuqing, LUO Xuetao. Influence Mechanism of Crucible Rotation Rates on the Flow Field and Oxygen Concentration of the Semiconductor-Grade Czochralski Monocrystalline Silicon Melt under Transverse Magnetic Field[J]. Journal of Synthetic Crystals, 2023, 52(9): 1641
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