Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 21 >Issue 8 >Page 631 > Article

Chinese Journal of Lasers
Vol. 21, Issue 8, 631 (1994)

Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition[J]. Chinese Journal of Lasers, 1994, 21(8): 631 Copy Citation Text

show less

Abstract

It is a new technology to combine the laser with the thin film deposition. Lead zirconate titanate (PZT) films were successfully deposited on the Si(100) and SiO2/Si substrates by pulsed eximer laser (λ=193 nm) deposition at 5 Hz, 4 J/cm2 and then annealed by RTA at various conditions.The structure, composition and thickness of the films were measured by XRD, RBS and ASR respectively.

Keywords

ferroelectric thin film pulsed laser deposition(PLD)PZT

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition[J]. Chinese Journal of Lasers, 1994, 21(8): 631

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information