• Chinese Journal of Lasers
  • Vol. 40, Issue 6, 603007 (2013)
Wang Xiao*, Xue Guochun, Li Pin, Jiang Tao, Gao Yangyang, Chen Hao, Huang Chuang, Yan Zhang, and Liu Huixia
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/cjl201340.0603007 Cite this Article Set citation alerts
    Wang Xiao, Xue Guochun, Li Pin, Jiang Tao, Gao Yangyang, Chen Hao, Huang Chuang, Yan Zhang, Liu Huixia. Investigation on Melt Pool in Transmission Laser Bonding of Silicon and Glass[J]. Chinese Journal of Lasers, 2013, 40(6): 603007 Copy Citation Text show less

    Abstract

    A study on transmission laser bonding of silicon and glass by Nd:YAG pulse laser is conducted. Independent and interactive effects of process parameters (power, speed and stand-off distance) on geometric elements of melt pool (melt pool depth, width, and depth/width ratio) are discussed. Based on this, effects of laser energy density on melt pool shaping for transmission laser bonding of silicon and glass are analyzed. And the relationships between energy density and geometric elements of melt pool are quantified. The matching curve of the melt pool depth/width ratio and lap-shear strength is obtained. The results indicate that the melt pool depth/width ratio stays steady when the laser energy density is more than 8 J/mm2, and lap-shear strength achieves the maximum value when the melt pool depth/width ratio is 0.25. Effects of laser energy density on melt pool shaping and bonding quality are significant.
    Wang Xiao, Xue Guochun, Li Pin, Jiang Tao, Gao Yangyang, Chen Hao, Huang Chuang, Yan Zhang, Liu Huixia. Investigation on Melt Pool in Transmission Laser Bonding of Silicon and Glass[J]. Chinese Journal of Lasers, 2013, 40(6): 603007
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