Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Xiaojun Jiang; Huijie Huang; Xiangzhao Wang; Lihua Huang

doi:10.3788/COL20090705.0407

Journals >Chinese Optics Letters >Volume 7 >Issue 5 >Page 05407 > Article

Chinese Optics Letters
Vol. 7, Issue 5, 05407 (2009)

Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, and Lihua Huang

Author Affiliations

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, ChinaE-mail: xiaojunj@siom.ac.cn

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DOI: 10.3788/COL20090705.0407 Cite this Article Set citation alerts

Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, Lihua Huang. Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark[J]. Chinese Optics Letters, 2009, 7(5): 05407 Copy Citation Text

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