Fig. 1. Experimental setup for 266 nm laser based on CLBO crystal

Fig. 2. Experimental results of transmittance and output power of 266 nm laser. (a) Transmittance of 266 nm laser at prism; (b) output power and conversion efficiency of 266 nm laser versus injected pump power

Fig. 3. Measurement results of output power and power stability of 266 nm laser. (a) Output power and conversion efficiency of 266 nm laser versus injected pump power when 10 mm long CLBO crystal is used ; (b) power stability of 266 nm laser with 10 mm long CLBO crystal

Fig. 4. Measurement results of power stability and beam quality of 266 nm laser. (a) Measured result of power stability of 266 nm laser with 20 mm long CLBO crystal; (b) beam quality of 266 nm laser (dot is data and curve is fitted curve) with beam spot measured at 1.5 m position after beam expansion using concave lens shown in inset

Fig. 5. Spectrum and pulse width of deep-ultraviolet 266 nm laser. (a) Spectrum; (b) pulse width

Table 1. Research progress of solid-state deep-ultraviolet laser based on CLBO crystal