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    Journals >Optics and Precision Engineering >Volume 13 >Issue z1 >Page 103 > Article
    • Optics and Precision Engineering
    • Vol. 13, Issue z1, 103 (2005)
    Multi-wavelength interferometry for nanometer scale spacing
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    [in Chinese], [in Chinese], [in Chinese]. Multi-wavelength interferometry for nanometer scale spacing[J]. Optics and Precision Engineering, 2005, 13(z1): 103 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese]. Multi-wavelength interferometry for nanometer scale spacing[J]. Optics and Precision Engineering, 2005, 13(z1): 103
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