A method of designing asymmetric double-sided off-axis aspheric mirror detection compensation zoom light path

Shuai Feng; Jun Chang; Ya-Jun Niu; Yu Mu; Xin Liu

doi:10.7498/aps.68.20182253

Journals >Acta Physica Sinica >Volume 68 >Issue 11 >Page 114201-1 > Article

Acta Physica Sinica
Vol. 68, Issue 11, 114201-1 (2019)

A method of designing asymmetric double-sided off-axis aspheric mirror detection compensation zoom light path

Shuai Feng¹, Jun Chang^1、*, Ya-Jun Niu¹, Yu Mu², and Xin Liu¹

Author Affiliations

¹School of Opto-Electronics, Beijing Institute of Technology, Beijing 100081, China

²Tianjin Jinhang Institute of Technical Physics, Tianjin 300192, China

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DOI: 10.7498/aps.68.20182253 Cite this Article

Shuai Feng, Jun Chang, Ya-Jun Niu, Yu Mu, Xin Liu. A method of designing asymmetric double-sided off-axis aspheric mirror detection compensation zoom light path[J]. Acta Physica Sinica, 2019, 68(11): 114201-1 Copy Citation Text

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Fig. 1. Schematic diagram of high precision detection system for asymmetric double off-axis aspheric mirror.非对称双面离轴非球面反射镜高精度检测系统示意图

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Fig. 2. Optical path figure of zoom null compensation device structure.变焦零位补偿装置结构光路图

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Fig. 3. Residual wave aberration map and optical path difference (OPD) aberration curves: (a) Zoom 1; (b) zoom 2.剩余波像差图和光程差曲线　(a)结构一; (b)结构二

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Fig. 4. Tolerance analysis results of null compensation detection RMS wave aberration: (a) Zoom 1; (b) zoom 2.零位补偿检测波像差公差分析结果图　(a)结构一; (b)结构二

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表面	A面	B面
表达形式	$x = \dfrac{c{y^2}}{1 \!+\! \sqrt {1{\rm{\! -\! }}\left( {k \!+\! 1} \right){c^2}{y^2}} } \!+\! A{y^4} \!+\! B{y^6} \!+\! C{y^8} \!+\! \cdots $
曲率半径/mm	–1000	–650
偏心量/mm	82.427	57.948
待检面口径/mm	56	39
二次曲面常数(K)	–1.5	–3.0
4阶系数(A面)	8.39516×10^–11	–9.24425×10^–10
6阶系数(B面)	9.36208×10^–17	8.12843×10^–16

Table 1. Parameter of asymmetric double-sided off-axis aspheric mirror.

公差项	公差最小值	公差项	公差最小值
曲率半径公差	0.025 mm	安装偏心公差	0.1 mm
厚度公差	0.15 mm	安装倾斜公差	20″
表面不规则度公差	0.05λ	折射率公差	0.002
空气间隔公差	0.15 mm

Table 2. Tolerance precision of compensation device

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