[1] MATSUNAGA T, ESASHI M. Acceleration switch with extrended holding time using squeeze film effect for side airbag systems[J].Sensors and Actuators A,2002,100:10-14.

[2] FIELD J R R V,EPP D S. Development and calibration of a stochasitc dynamics model for the design of a MEMS inertial switch [J].Sensors and Actuators A,2007,134:109-118

[3] ZHNG P,WEN J M,CHENG G M,et al.. Research on novel inertial piezoelectic actuator [J].Opt. Precision Eng.,2006,14(4):623-627.(in Chinese)

[4] CHEN Z, HU X D, FU X, et al..Nanoscale measurement of MEMS in-plane motion based on block matching[J].Opt.Precision Eng.,2008,16(3):505-510.(in Chinese)

[5] LIJL, FANG J G, SHENG W, et al..Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J].Opt. Precision Eng.,2008,16(3):484-491.(in Chinese)

[6] CHEN G Y, WU J L,ZHAO L. Fabrication of a micro-mechanical g-switch[J].Journal of Trans-ducer Technlolgy,2005,24(6):82-84.(in Chi-nese)

[7] TIAN W C, JIA J Y, CHEN G Y. On adhesion force on MEMS micro-cantilever with rough surface[A].Proceeding of the 2006 International Conference on Networking[C].Sensing and Control.Florida:2006.1096-1100.