Dynamic analysis on a novel nanopositioning stage driven by PZT

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 10 >Issue 2 >Page 143 > Article

Optics and Precision Engineering
Vol. 10, Issue 2, 143 (2002)

Dynamic analysis on a novel nanopositioning stage driven by PZT

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic analysis on a novel nanopositioning stage driven by PZT[J]. Optics and Precision Engineering, 2002, 10(2): 143 Copy Citation Text

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References

[1] Paros J M,Weisbord L.How to design flexure hinges[J].Machine Design.1965:151-156.

[2] Xu W,King T.Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy and stress considerations[J].Precision Engineering.1996.19(1):4-10.

[3] Ku S S, Pinsopon U, Cetinkunt S, et al.Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nano-positioner[J].IEEE/ASME Transactions on Mechatronics,2000,5(3):14-17.

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic analysis on a novel nanopositioning stage driven by PZT[J]. Optics and Precision Engineering, 2002, 10(2): 143

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