• Chinese Optics Letters
  • Vol. 16, Issue 10, 102201 (2018)
Xing Su1, Longguang Xia1, Kan Liu1, Peng Zhang1, Ping Li2, Runchang Zhao2, and Bo Wang1、*
Author Affiliations
  • 1Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
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    DOI: 10.3788/COL201816.102201 Cite this Article Set citation alerts
    Xing Su, Longguang Xia, Kan Liu, Peng Zhang, Ping Li, Runchang Zhao, Bo Wang. Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing[J]. Chinese Optics Letters, 2018, 16(10): 102201 Copy Citation Text show less

    Abstract

    In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).
    SiO2+FSiF4+CO2,SiC+F+OSiF4+CO2.(1)

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    F=R×P,F=[f1f2fn2],R=[r11r12r1n2r21r22r2n2rn21rn22rn2n2],P=[p1p2pn2].(2)

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    r(x,y)=a·ex2+y22σ2.(3)

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    r(x,y)=0sr(xξ,y)dξ=π2aσey22σ2[erf(sx2σ)+erf(x2σ)].(4)

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    minRPF2mini=1n×nti=mins·i=1n×npi,s.t.LB<P<UB,diff(P)<UB,(5)

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    Xing Su, Longguang Xia, Kan Liu, Peng Zhang, Ping Li, Runchang Zhao, Bo Wang. Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing[J]. Chinese Optics Letters, 2018, 16(10): 102201
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