Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 37 >Issue 1 >Page 119 > Article

Infrared and Laser Engineering
Vol. 37, Issue 1, 119 (2008)

Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure

[in Chinese]^1、2、*, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure[J]. Infrared and Laser Engineering, 2008, 37(1): 119 Copy Citation Text

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Abstract

作者简介：沈亦兵(1961-)男,浙江杭州人,教授,博士生作者,博士,主要从事微光学、光刻技术等的研究.Email:edeoco@moi-lab2.zju.edu.cn

[in Chinese], [in Chinese], [in Chinese]. Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure[J]. Infrared and Laser Engineering, 2008, 37(1): 119

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