Measurement of Stair-like Surfaces’ Topography by Data-processing

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 27 >Issue 3 >Page 219 > Article

Chinese Journal of Lasers
Vol. 27, Issue 3, 219 (2000)

Measurement of Stair-like Surfaces’ Topography by Data-processing

[in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Stair-like Surfaces’ Topography by Data-processing[J]. Chinese Journal of Lasers, 2000, 27(3): 219 Copy Citation Text

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Abstract

The reason why the measuring results are probably wrong when measuring the topography of stair-like surfaces is analyzed, and the new data processing method is presented, which can be applied to correct the measuring results of stair-like surfaces’ topography. The method has been successfully used in the system for measuring the 3-D surface topography of diffractive optical elements.

Keywords

data processing microstructure phase-shifting interferometry topography

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Stair-like Surfaces’ Topography by Data-processing[J]. Chinese Journal of Lasers, 2000, 27(3): 219

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