A novel micro-gripper integrating micro tri-axial force sensor

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 15 >Issue 4 >Page 550 > Article

Optics and Precision Engineering
Vol. 15, Issue 4, 550 (2007)

A novel micro-gripper integrating micro tri-axial force sensor

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A novel micro-gripper integrating micro tri-axial force sensor[J]. Optics and Precision Engineering, 2007, 15(4): 550 Copy Citation Text

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References

[1] CHU Z,SARRO P M,MIDDELHOEK S.Silicon three-axial tactile sensor[J].Sensor Actuator,1996,A54:505-510.

[2] RUTHER P,BARTHOLOMEYCZIK J,TRAUTMANN A,et al..Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components[C].Proceedings of the 2005 IEEE International Conference,1006-1009.

[4] ARAI F,SUGIYAMA T,FUKUDA T,et al..Micro tri-axial force sensor for 3D bio-micromanipulation[C].Proceedings of the 1999 IEEE International Conference on Robotics 14 Automation.Detroit,Michigan May 1999,2744-2749.

[9] VAZSONYI E,ADAM M,VIZVARY Z,et al.Three-dimensional force sensor by novel alkaline etching technique[J].Sensor Actuator,2005,A123-124:620-626.

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[1] CUI Yu-guo, ZHU Yao-xiang, LOU Jun-qiang, FENG Feng-yi. Detection of finger displcement and gripping force of piezoelectric micro-gripper[J]. Optics and Precision Engineering, 2015, 23(5): 1372

[2] LI Xiao-zhou, YU Hua-dong, XU Jin-kai, LI Yi-quan, ZHAO Ping. Theory and experiments of cutting forces in micro-cutting process[J]. Optics and Precision Engineering, 2009, 17(5): 1086

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A novel micro-gripper integrating micro tri-axial force sensor[J]. Optics and Precision Engineering, 2007, 15(4): 550

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