Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

Xin Guo; Jinbin Ding; Yi Zhou; Yu Wang

doi:10.1017/hpl.2018.2

Journals >High Power Laser Science and Engineering >Volume 6 >Issue 1 >Page 010000e9 > Article

High Power Laser Science and Engineering
Vol. 6, Issue 1, 010000e9 (2018)

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

Xin Guo^1、2, Jinbin Ding^1、2、†, Yi Zhou^1、2, and Yu Wang^1、2

Author Affiliations

¹Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

²Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China

show less

DOI: 10.1017/hpl.2018.2 Cite this Article Set citation alerts

Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9 Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

Cited By

Article index updated: Feb. 24, 2023

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 4 article(s) from Web of Science.

Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9

Download Citation

EndNote(RIS)

BibTex

Plain Text

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information