• Acta Physica Sinica
  • Vol. 69, Issue 1, 016101-1 (2020)
Na Zhang, Bo Liu*, and Li-Wei Lin
DOI: 10.7498/aps.69.20191344 Cite this Article
Na Zhang, Bo Liu, Li-Wei Lin. Effect of He ion irradiation on microstructure and electrical properties of graphene[J]. Acta Physica Sinica, 2020, 69(1): 016101-1 Copy Citation Text show less
XPS C1 s peak spectra of graphene samples: (a) Unirradiated; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2.石墨烯样品XPS C1 s峰谱图 (a)未辐照; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2
Fig. 1. XPS C1 s peak spectra of graphene samples: (a) Unirradiated; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2. 石墨烯样品XPS C1 s峰谱图 (a)未辐照; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2
The Raman spectra of unirradiated graphene.未辐照石墨烯Raman光谱图
Fig. 2. The Raman spectra of unirradiated graphene.未辐照石墨烯Raman光谱图
The Raman spectra of graphene before and after He+ irradiation.He+辐照前后石墨烯Raman光谱图
Fig. 3. The Raman spectra of graphene before and after He+ irradiation. He+辐照前后石墨烯Raman光谱图
The relationship between Raman peak strength ID/IG, I2D/IG ratio and irradiation dose.Raman峰强ID/IG, I2D/IG比值与辐照剂量的关系
Fig. 4. The relationship between Raman peak strength ID/IG, I2D/IG ratio and irradiation dose. Raman峰强ID/IG, I2D/IG比值与辐照剂量的关系
Electrical conductivity versus gate voltage at different irradiation doses.不同辐照剂量下电导率随栅极电压变化曲线
Fig. 5. Electrical conductivity versus gate voltage at different irradiation doses.不同辐照剂量下电导率随栅极电压变化曲线
The relation between Dirac voltage variation and irradiation dose.狄拉克电压偏移量与辐照剂量的关系
Fig. 6. The relation between Dirac voltage variation and irradiation dose.狄拉克电压偏移量与辐照剂量的关系
辐照剂量C-C sp2C—C sp3C—O—HC—O—CO—C=O
未辐照0.520.190.100.090.10
0.7 × 1013 He+/cm20.500.300.130.050.02
1.6 × 1013 He+/cm20.370.320.150.100.06
2.5 × 1013 He+/cm20.280.350.200.120.05
Table 1. C1 s peak area ratio of graphene samples before and after irradiation.
Na Zhang, Bo Liu, Li-Wei Lin. Effect of He ion irradiation on microstructure and electrical properties of graphene[J]. Acta Physica Sinica, 2020, 69(1): 016101-1
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