The sample's elemental and isotopic content information can be obtained by inductively coupled plasma mass and optical emission spectrometry analysis of excimer laser ablated products. Excimer laser ablation coupled mass and optical emission spectrometry are among the most important analytical techniques suitable for in situ microanalyses. Excimer laser ablation based sampling technique coupled with either ICP mass spectrometry or optical emission spectrometry techniques have witnessed widely applications in geology, materials science, environmental science, and even life science research. The combination of excimer laser ablation sampling technique and plasma analysis techniques fully demonstrates their respective advantages: the former's in-situ sampling solid surface feature satisfying both the needs of evaluating elemental or isotopic concentration with high space-resolution and avoidance of polluted problem during sample pretreatment, furthermore, high-energy laser of pulse width ranging from nanosecond to femtosecond, low thermal effect resulting from ablation of solid sample surface and leading to less elemental or isotopic fractionation effects in laser ablation products which can fully represent the original elemental or isotopic information in analytes; either ICP mass spectrometry or optical emission spectrometry-based techniques have been applied successfully to investigate elemental or isotopic information in analytes, and the tandem of laser sampling technique with ICP mass technique have already produced various in-situ elemental and isotopic concentrations data in solid surface samples with high quality; simultaneously integrated ICP mass spectrometry with optical emission spectrometry has been recently proposed for chemical analysis in analyte, aiming at improve elemental and isotopic analysis accuracy and precision based on ICP mass and OES techniques. This paper introduces our instrumental construction solution of excimer laser ablation coupled with plasma mass and optical emission spectrometry analysis techniques, and the technical problems and key experimental verification of independent research and relevant developments have been summarized and prospected.