The 800 nm, 150 fs, 1 kHz femtosecond laser micromachining for different materials under different processing conditions is studied. The diffraction-limited cutting on the gold and silver films is obtained, respectively. A 4×4 array holes with the diameter of 3 μm are drilled in the GaAs materials. The transmission gratings with the grating constant of 2.5 μm and 5 μm are fabricated into the ZK6 and LaF2 glasses at the machining speed of 400 μm/s.