Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser

Jingzhen Shao; Xu Liang; Libing You; Ning Pan; Ying Lin; Shimao Wang; Zanhong Deng; Xiaodong Fang; Xi Wang

doi:10.3788/COL202018.021403

Journals >Chinese Optics Letters >Volume 18 >Issue 2 >Page 021403 > Article

Chinese Optics Letters
Vol. 18, Issue 2, 021403 (2020)

Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser

Jingzhen Shao^1、2、3, Xu Liang^1、2、3, Libing You^1、2, Ning Pan¹, Ying Lin¹, Shimao Wang^1、2, Zanhong Deng¹, Xiaodong Fang^1、2、*, and Xi Wang^2、3、**

Author Affiliations

¹Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

²Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China

³State Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China

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DOI: 10.3788/COL202018.021403 Cite this Article Set citation alerts

Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, Xi Wang. Laser-induced damage and periodic stripe structures of a CaF₂ single crystal by an ArF excimer laser[J]. Chinese Optics Letters, 2020, 18(2): 021403 Copy Citation Text

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Abstract

The laser-induced damage threshold of a calcium fluoride (CaF₂) single crystal was obtained by a 193 nm ArF excimer laser. The damage morphology of the crystal was analyzed. The results showed that the surface of CaF₂ single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved fragments. Laser-induced periodic stripe structures (LIPSS) appeared on the surface layer beneath the fragments that peeled off. The spacing of LIPSS was measured, and the formation mechanism of LIPSS was analyzed based on the interference model.

Keywords

excimer lasers laser damage laser-induced periodic stripe structures optical materials