[2] YAO Q H, CAO M. Design of optical emission system in 3D shape detection with oblique laser triangulation probe[J]. Journal of Physics: Conference Series, 1774, 012063(2021).

[6] HERATH M, EMMANUEL C, JEEWANTHA J, et al. Distributed sensing based real-time process monitoring of shape memory polymer components[J]. Journal of Applied Polymer Science, 139, 52247(2022).

[7] BAI J, LI J W, WANG X H, et al. A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor[J]. Optics and Lasers in Engineering, 154, 107019(2022).

[8] MINSKY M. Microscopy apparatus: US, 3013467A[P]. 19611219.

[9] MOLESINI G, PEDRINI G, POGGI P, et al. Focus-wavelength encoded optical profilometer[J]. Optics Communications, 49, 229-233(1984).

[10] BROWNE M A, AKINYEMI O, BOYDE A. Confocal surface profiling utilizing chromatic aberration[J]. Scanning, 14, 145-153(2011).

[11] YU Q, WANG C, ZHANG Y L, et al. Error analysis and correction of thickness measurement for transparent specimens based on chromatic confocal microscopy with inclined illumination[J]. Photonics, 9, 155(2022).

[15] MOWLA A, DU B W, TAIMRE T, et al. Confocal laser feedback tomography for skin cancer detection[J]. Biomedical Optics Express, 8, 4037-4048(2017).

[16] AGOYAN M, FOURNEAU G, CHEYMOL G, et al. Toward confocal chromatic sensing in nuclear reactors: in situ optical refractive index measurements of bulk glass[J]. IEEE Transactions on Nuclear Science, 69, 722-730(2022).

[17] CHAN M C, LIAO T H, HSIEH C S, et al. Imaging of nanoscale birefringence using polarization-resolved chromatic confocal microscopy[J]. Optics Express, 29, 3965-3975(2021).

[19] RAHLVES M, ROTH B, REITHMEIER E. Confocal signal evaluation algorithms for surface metrology: uncertainty and numerical efficiency[J]. Applied Optics, 56, 5920-5926(2017).

[20] LI J F, ZHAO Y L, DU H, et al. Adaptive modal decomposition based overlapping-peaks extraction for thickness measurement in chromatic confocal microscopy[J]. Optics Express, 28, 36176-36187(2020).

[21] CHEN C, WANG J, LIU X J, et al. Influence of sample surface height for evaluation of peak extraction algorithms in confocal microscopy[J]. Applied Optics, 57, 6516-6526(2018).

[22] LUO D, KUANG C F, LIU X. Fiber-based chromatic confocal microscope with Gaussian fitting method[J]. Optics & Laser Technology, 44, 788-793(2012).

[24] KALMAN R E. A new approach to linear filtering and prediction problems[J]. Journal of Basic Engineering, 82, 35-45(1960).