Wenwen WANG, Leijie LAI, Pengzhi LI, Limin ZHU. Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage[J]. Optics and Precision Engineering, 2024, 32(6): 833
- Optics and Precision Engineering
- Vol. 32, Issue 6, 833 (2024)
Fig. 1. Block diagram of a data-driven feedforward-feedback control loop
Fig. 2. Flow chart of resonant frequency extraction algorithm
Fig. 3. Micro/nanopositioning stage experimental system
Fig. 4. Overall block diagram of the composite control circuit of the positioning system
Fig. 5. Comparison of tracking results between different controllers
Fig. 6. Convergence effect of tracking error with different learning rates
Fig. 7. Different reference trajectory tracking effects
Fig. 8. Comparison of non-periodic signal tracking results between different controllers
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Table 1. Comparison of tracking error results of different controllers
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