Author Affiliations
1School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China2Nanjing Astronomical Instruments Co., Ltd., Chinese Academy of Sciences, Nanjing 210000, Chinashow less
Fig. 1. Relationship between the lattice temperature of the Ag film and the picosecond laser energy density, wherein the thickness of the Ag film is (a) 30 nm, (b) 50 nm, (c) 100 nm, and (d) 200 nm.
Fig. 2. Schematic diagram of the picosecond LIFT system.
Fig. 3. Schematic diagram of laser scanning transfer processing. (a) Scanning pitch . (b) Scanning pitch .
Fig. 4. Micro-morphology of AZO thin film after the transfer of 50 nm Ag film under parameters , : (a) 110 times, (b) 1000 times, (c) 5000 times, and (d) 17,000 times.
Fig. 5. Sectional view of Ag-AZO films after the transfer of 50 nm Ag film under parameters , .
Fig. 6. (a) Micro-morphology of AZO film after the transfer of a 30 nm Ag film under parameters , ; (b) micro-morphology of AZO thin film after the transfer of a 50 nm Ag film under parameters , .
Fig. 7. (a) AFM diagram of initial AZO film; (b) AFM diagram of 30 nm Ag-AZO film.
Fig. 8. (a) Light transmittance curves of the AZO film samples after the transfer of 50 nm Ag films; (b) light transmittance curves of the AZO film samples after the transfer of 30 nm Ag films.
Number | Laser Parameter | (%) | | |
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| V (mm/s) |
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0 | / | / | 79.78 | 9.19 | 8.68 | 1 | 0.22 | 15 | 65.48 | 8.60 | 7.61 | 2 | 0.32 | 20 | 61.92 | 8.14 | 7.60 | 3 | 0.48 | 20 | 61.51 | 7.97 | 7.76 | 4 | 0.50 | 20 | 60.80 | 7.91 | 7.68 | 5 | 0.65 | 20 | 70.12 | 7.89 | 8.88 | 6 | 0.79 | 25 | 75.43 | 7.87 | 9.58 | 7 | 1.98 | 20 | 58.39 | 20.28 | 2.88 |
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Table 1. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 50 nm Ag Film Transfer Sample
Number | Laser Parameter | (%) | | |
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| V (mm/s) |
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0 | / | / | 78.03 | 9.11 | 8.56 | 1 | 0.15 | 15 | 74.48 | 8.45 | 8.81 | 2 | 0.22 | 15 | 71.64 | 8.42 | 8.51 | 3 | 0.22 | 15 | 74.69 | 7.93 | 9.41 | 4 | 0.32 | 15 | 68.32 | 7.91 | 8.63 | 5 | 0.32 | 15 | 69.18 | 8.10 | 8.54 | 6 | 0.41 | 15 | 70.63 | 8.01 | 8.82 | 7 | 0.41 | 15 | 69.19 | 7.85 | 8.81 |
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Table 2. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 30 nm Ag Film Transfer Sample
Number | 0 | 1 | 2 | 3 |
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Roughness (nm) | 3.649 | 17.596 | 20.367 | 21.485 |
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Table 3. Surface Roughness of AZO Film after 30 nm Ag Film Transfer