To improve the signal-to-noise ratio and filter the useless signal, Ta2O5 and SiO2 are chosen as the film materials. Electron gun and ion-assisted deposition system are used for film preparation. The interference cut-off filter films which have specific transmittance at 589, 1064, 1178, 1342 nm are deposited. In the actual coating process, the refractive indexes of materials are not stable in different conditions. In addition, the monitoring method lead to the errors. Optimizing the parameters and designing the film system can effectively control film thickness monitoring accuracy. Therefore, the optical properties corresponding to the wavelengths are enhanced. The experimental results show that the filter film can withstand high temperature, wet and other environments, completely meeting the demands of yellow laser.