Fig. 1. Picosecond laser parallel processing system based on spatial light modulator

Fig. 2. Flowchart of GS algorithm

Fig. 3. Flowchart of GS-GA algorithm

Fig. 4. Flowchart of feedback GS-GA algorithm

Fig. 5. Influence of zero-order beam and its elimination method. (a) Effect of zero-order beam on multi-beam splitting; (b) effect of zero-order beam on processing; (c) zero-order beam elimination method

Fig. 6. Beam splitting effects of three algorithms captured by camera. (a1)(a2)(a3) GS algorithm; (b1)(b2)(b3) GS-GA algorithm;(c1)(c2)(c3) feedback GS-GA algorithm

Fig. 7. Beam splitting processing effects of three different algorithms. (a1)(a2)(a3) GS algorithm; (b1)(b2)(b3) GS-GA algorithm;(c1)(c2)(c3) feedback GS-GA algorithm

Fig. 8. Ways to selecting holes. (a) Serial numbers of holes under cross arrangement; (b) serial numbers of holes under annular arrangement; (c) serial numbers of holes under 8×8 array arrangement

Fig. 9. Machining hole diameters and depths obtained by three algorithms. (a) Machining hole diameter under cross arrangement; (b) machining hole depth under cross arrangement.(c) machining hole diameter under annular arrangement; (d) machining hole depth under annular arrangement; (e) machining hole diameter under 8×8 array arrangement; (f) machining hole depth under 8×8 array arrangement

Fig. 10. Processing effects of 10×10 beam array generated by feedback GS-GA algorithm on aluminum sample. (a) Full view of aluminum sample after processing; (b) 3D morphology of hole array; (c) depth of first row of holes; (d) depth of fifth row of holes; (e) depth of sixth row of holes; (f) depth of tenth row of holes

Table 1. Main parameters of picosecond laser

Table 2. Main parameters of spatial light modulators

Table 3. Running time of GS algorithm, GS-GA algorithm and feedback GS-GA algorithm

Table 4. Energy uniformity of split beams generated by GS algorithm, GS-GA algorithm, and feedback GS-GA algorithm under different arrangements

Table 5. Machining hole diameter uniformity obtained through GS algorithm, GS-GA algorithm, and feedback GS-GA algorithm under different arrangements

Table 6. Machining hole depth uniformity obtained through GS algorithm, GS-GA algorithm, and feedback GS-GA algorithm under different arrangements