• Chinese Optics Letters
  • Vol. 11, Issue s1, S10207 (2013)
Stephan Waldner, Patrick Biedermann, and Silvia Schwyn Thony
DOI: 10.3788/col201311.s10207 Cite this Article Set citation alerts
Stephan Waldner, Patrick Biedermann, Silvia Schwyn Thony. Online re-optimization of optical filters on a production sputter tool[J]. Chinese Optics Letters, 2013, 11(s1): S10207 Copy Citation Text show less
References

[1] O. Zueger, in Proceedings of Vakuum V2011 Workshop 6: Beschichtung fur den optischen Geratebau Wsb 10 (2011).

[2] B. T. Sullivan and J. A. Dobrowolski, Appl. Opt. 32, 2351 (1993).

[3] M. Trubetskov, T. Amotchkina, and A. Tikhonravov, Proc. SPIE 8168, 81681D (2011).

[4] A. V. Tikhonravov and M. K. Trubetskov, "OptiLayer thin film software", http://www.optilayer.com (2003).

[5] T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, Appl. Opt. 50, 3389 (2011).

[6] S. Schlichting, K. Heinrich, H. Ehlers, D. Ristau, Proc. SPIE 8168, 81681E (2011).

Data from CrossRef

[1] Stephan Waldner, Daniel Schachtler, Silvia Schwyn Thoeny, Thomas Frei. Efficient Development of Robust Strategies for Broadband and Monochromatic Optical Monitoring. Optical Interference Coatings Conference (OIC) 2022, WC.3(2022).

Stephan Waldner, Patrick Biedermann, Silvia Schwyn Thony. Online re-optimization of optical filters on a production sputter tool[J]. Chinese Optics Letters, 2013, 11(s1): S10207
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