• Optics and Precision Engineering
  • Vol. 17, Issue 6, 1373 (2009)
TAO Lin1,*, LUO Yi1,2, ZHANG Yan-guo1, ZHANG Zong-bo1, and WANG Xiao-dong1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    TAO Lin, LUO Yi, ZHANG Yan-guo, ZHANG Zong-bo, WANG Xiao-dong. Fabrication of micro energy director on polymethyl methacrylate substrate for micro ultrasonic bonding[J]. Optics and Precision Engineering, 2009, 17(6): 1373 Copy Citation Text show less
    References

    [1] BECKER H, GARTBER C.Polymer microfabrication technologies for microfluidic systems [J].Analytical and Bioanalytical Chemisiry, 2008,390(1):89-111.

    [2] LUO Y, WANG X, YANG F. Microfluidic chip made of COP (cyclo-olefin polymer) and comparison to PMMA (polymethyl methacrylate) microfluidic chip[J].Journal of Materials Processing Technology,2008,208(1-3):63-69.

    [3] HE Y, FU Z, CHEN Z C. Study on polymer flow profile in micro hot embossing [J].Opt.Precision Eng.,2008,16(2):270-278.(in Chinese)

    [4] ZHANG G, CHU V, CONDE J P. Conductive blended polymer MEMS microresonators [J],Journal of Microelectromechanical Systems, 2007,16(2):329-335.

    [5] LUO Y, WANG X D, YANG F,et al..Variable temperatur quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer(COP)[J].Opt. Precision Eng.,2007,15(7):1090-1095.(in Chinese)

    [6] GRIEBEL A, RUND S, SCHOENFELD F,et al..Integrated polymer chip for two-dimensional capillary gel electrophorese[J].Lab on a Chip,2004,4(1):18-23.

    [7] PAUL D, PALLANDRE A, MISERERE S. Lamination-based rapid prototyping of microfluidic devices using flexible thermoplastic substrates [J].Electrophoresis,2007,28(7):1115-1122.

    [8] TRUCKENMULLER R, HENZI P, HERRMANN D,et al.. Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperatures [J].Microsystem Technologies,2004,10(5):372-374.

    CLP Journals

    [1] LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Optics and Precision Engineering, 2011, 19(4): 754

    TAO Lin, LUO Yi, ZHANG Yan-guo, ZHANG Zong-bo, WANG Xiao-dong. Fabrication of micro energy director on polymethyl methacrylate substrate for micro ultrasonic bonding[J]. Optics and Precision Engineering, 2009, 17(6): 1373
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