Laser self-mixing interferometer for MEMS dynamic measurement

Zhaoyun ZHANG; Yang GAO; Wei SU

doi:10.1007/s12200-013-0318-x

[1] Yazdi N, Ayazi F, Najafi K. Micromachined inertial sensors. Proceedings of the IEEE, 1998, 86(8): 1640-1659

[2] Barbour N, Schmidt G. Inertia sensor technology trends. IEEE Sensors Journal, 2001, 1(4): 332-339

[3] Geen J A, Sherman S J, Chang J F, Lewis S R. Single-chip surface micromachined integrated gyroscope with 50o/h Allan deviation. IEEE Journal of Solid-State Circuits, 2002, 37(12): 1860-1866

[4] Piyabongkarn D, Rajamani R, Greminger M. The development of a MEMS gyroscope for absolute angle measurement. IEEE Transactions on Control Systems Technology, 2005, 13(2): 185-195

[5] Wang W M, Boyle W J O, Grattan K T V, Palmer A W. Fiber-optic Doppler velocimeter that incorporates active optical feedback from a diode laser. Optical Society of America, 1992, 17(11): 819-821

[6] Yoon E, Wise K D. An integrated mass flow sensor with on-chip CMOS interface circuitry. IEEE Transactions on Electron Devices, 1992, 39(6): 1376-1386

[7] Holswade S C, Dickey F M. Optical measurement of micromachine engine performance. Proceedings of Micromachined Devices and Components III, 1997, 3224: 131-140

[8] Burdess J S, Harris A J,Wood D, Pitcher R, Glennie D. A system for the dynamic characterization of microstructures. Journal of Microelectromechanical Systems, 1997, 6(4): 322-328

[9] Dickey F M, Holswade S C, Hornak L A, Brown K S. Optical methods for micromachine monitoring and feedback. Sensors and Actuators A, Physical, 1999, 78(2-3): 220-235

[10] Skvortzov V, Yong C C, Byeung L L, Cimoo S. Development of a gyro test system at Samsung Advanced Institute of Technology. In: Proceedings of Position Location and Navigation Symposium. 2004, 133-142

[11] Plantier G, Bes C, Bosch T. Behavioral model of a self-mixing laser diode sensor. IEEE Journal of Quantum Electronics, 2005, 41(9): 1157-1167

[12] Lang R, Kobayashi K. External optical feedback effects on semiconductor injection laser properties. IEEE Journal of Quantum Electronics, 1980, 16(3): 347-355

[13] Wang W M, Grattan K T V, Palmer A W, BoyleWJ O. Self-mixing interference inside a single-mode diode laser for optical sensing applications. Journal of Lightwave Technology, 1994, 12(9): 1577-1587

[14] King P, Steward G J. Metrology with an optical maser. New Scientist, 1963, 17(3): 180-182

[15] Kato J, Kikuchi N, Yamaguchi I, Ozono S. Optical feedback displacement sensor using a laser diode and its performance improvement. Measurement Techniques, 1995, 6(1): 45-52

[16] Servagent N, Bosch T, Lescure M. A laser displacement sensor using the self-mixing effect for modal analysis and defect detection. Instrumentation and Measurement, 1997, 46(4): 847-850

[17] Yu Y G, Qiang F. Displacement measurement by differential type of self-mixing interference system. Optical Journal, 1998, 37(28): 1269-1273

[18] Zhang Z Y, Gao Y. Velocity measurement by the self-mixing effect. Infrared and Laser Engineering Supplement, 2008, 37: 182-187

[19] Xu J, Zhao T P, He D Y, Lv L, Gui H Q, Ming H, Xie J P, Yi B. Methods for high accuracy and wide dynamic range velocity measurement with laser Doppler velocimetry by optical self-mixing in single mode VCSEL. Journal of University of Science and Technology of China, 2005, 35(5): 583-588

[20] Xu J, Zhao T P, He D Y, Wang H Q, Ming H, Xie J P, Lv L, Gui H Q, Yi B. Improvement of laser ranging precision using the selfmixing effect in a single-mode VCSEL. Opto-Electronic Engineering, 2006, 33(12): 27-31

[21] Merlo S, Donati S. Reconstruction of displacement waveforms with a single-channel laser-diode feedback interference. IEEE Journal of Quantum Electronics, 1997, 33(4): 527-531

[22] Donati S, Falzoni L, Merlo S. A PC-interface compact laser diode feedback interferometer for displacement measurement. IEEE Transactions on Instrumentation and Measurement, 1996, 45(6): 942-947

[23] Zhang Z Y, Gao Y. FFT phase detection method for self-mixing laser diode micro-displacement measurement. Laser & Optoelectronics Progress, 2010, 47(7): 071201-1-071201-5

[24] Yoshino T, Nara M, Mnatzakanian S, Lee B S, Strand T C. Laser diode feedback interferometer for stabilization and displacement measurements. Applied Optics, 1987, 26(5): 892-897