• Chinese Journal of Lasers
  • Vol. 45, Issue 5, 502008 (2018)
Li Xiaoji, Dong Yiwei*, Yin Chunping, Zhao Qi, and You Yancheng
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/CJL201845.0502008 Cite this Article Set citation alerts
    Li Xiaoji, Dong Yiwei, Yin Chunping, Zhao Qi, You Yancheng. Geometric Parameters Evolution Experiment of Hole During Femtosecond Laser Helical Drilling[J]. Chinese Journal of Lasers, 2018, 45(5): 502008 Copy Citation Text show less
    Schematic diagram of femtosecond laser machining system
    Fig. 1. Schematic diagram of femtosecond laser machining system
    Schematic diagram of laser helical scanning path
    Fig. 2. Schematic diagram of laser helical scanning path
    Self-designed fixture system
    Fig. 3. Self-designed fixture system
    Aperture after the steel sheet is spliced and laser focus location
    Fig. 4. Aperture after the steel sheet is spliced and laser focus location
    Schematic of the plasma shielding phenomenon
    Fig. 5. Schematic of the plasma shielding phenomenon
    Hole evolution process with the focus down rate of 0
    Fig. 6. Hole evolution process with the focus down rate of 0
    Time-dependent change of microhole depth at different focus down rates
    Fig. 7. Time-dependent change of microhole depth at different focus down rates
    Comparison of the ablation depth curve of the focus with and without moving down at a high speed
    Fig. 8. Comparison of the ablation depth curve of the focus with and without moving down at a high speed
    Comparison of the ablation depth curve of the focus moving down at three different medium rates
    Fig. 9. Comparison of the ablation depth curve of the focus moving down at three different medium rates
    SEM images of the machined holes in different focus down rates with the processing time of 100 s. Focus down rates: (a) 0; (b) 0.005 mm/s; (c) 0.010 mm/s; (d) 0.015 mm/s; (e) 0.020 mm/s
    Fig. 10. SEM images of the machined holes in different focus down rates with the processing time of 100 s. Focus down rates: (a) 0; (b) 0.005 mm/s; (c) 0.010 mm/s; (d) 0.015 mm/s; (e) 0.020 mm/s
    Transmission characteristics and light intensity distribution of the Gaussian beam
    Fig. 11. Transmission characteristics and light intensity distribution of the Gaussian beam
    ParameterRange
    Pulse width /fs250
    Wavelength /nm1064
    Repetition rate /kHz60-600
    Average power /W0-15
    Rotation rate /(r·min-1)600-2400
    Air-blowing pressure /MPa0-0.5
    Spot radius /μm15-25
    Table 1. Related parameters of laser and machine
    FactorProcessparameterLevel1Level2Level3Level4Level5
    ASingle pulseenergy /μJ2022242628
    BRepetitionrate /kHz100200300400500
    CAir-blowingpressure /MPa0.10.20.30.40.5
    DRotation rate /(r·min-1)6001050150019502400
    ERate of focusdown /(mm·s-1)00.0050.010.0150.02
    Table 2. Factors and levels of orthogonal experiment
    Rate of focusdown /(mm·s-1)Drilling time /s
    Hole1Hole2Hole3Hole4Hole5Hole6Hole7Hole8Hole9Hole10Hole11Hole12Hole13Hole14Hole15
    0123610152030405060708090100
    0.005123610152030405060708090100
    0.010123610152030405060708090100
    0.015123610152030405060708090100
    0.020123610152030405060708090100
    Table 3. Schedule of focus down test
    LevelColumn number/Factor
    1/A2/B3/C4/D5/E6/None
    I-207.056195.378204.742206.422230.002226.208
    II¯197.594204.326205.804222.628225.840223.050
    III¯225.480207.150225.068212.850222.076224.577
    IV¯236.082236.838233.638234.718215.496209.452
    V-241.576264.096238.536231.170214.374224.196
    R-43.98268.71833.79428.29615.62816.756
    Table 4. Range analysis of orthogonal experimental data
    Source of variationSum of squaresFreedomVarianceF-valueCritical valueof F-testSignificance
    Single pulse energy7058.15141764.5387.515*
    Repetition rate16164.42344041.10617.210**
    Air-blowing pressure4887.32741221.8325.203F0.05,(4,4)=6.39
    Rotation rate2858.2444714.5613.043F0.01,(4,4)=15.98
    Rate offocus down891.3134222.8280.949
    Error939.2604234.815
    Total32798.718241366.613
    Table 5. Variance analysis of orthogonal experimental data
    SerialnumberSinglepulseenergy /μJRepetitionrate /kHzAir-blowingpressure /MPaRotationrate /(r·min-1)Rate offocus down /(mm·s-1)Ablation depth /μmRelativeerror /%
    ExperimentalvalueSimulationvalue
    1205000.310500.010240.91235.48-2.25
    2224000.224000.015278.19276.51-0.61
    3245000.124000.020248.38250.220.74
    4264000.310500.015248.64245.32-1.34
    5282000.46000.010182.18184.351.19
    Table 6. Verification experimental data and network simulation results
    Li Xiaoji, Dong Yiwei, Yin Chunping, Zhao Qi, You Yancheng. Geometric Parameters Evolution Experiment of Hole During Femtosecond Laser Helical Drilling[J]. Chinese Journal of Lasers, 2018, 45(5): 502008
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