Qiuling WEN, Xinyu WEI, Hualu WANG, Changcai CUI, Jing LU, Zhongwei HU, Feng JIANG. Characteristics and Mechanism of CVD Single Crystal Diamond Processed by Picosecond Laser[J]. Acta Photonica Sinica, 2021, 50(6): 118
- Acta Photonica Sinica
- Vol. 50, Issue 6, 118 (2021)
Fig. 1. Schematic diagram of a picosecond laser processing CVD diamond device
Fig. 2. SEM image of ablation diamond morphology by picosecond laser at different energy densities
Fig. 3. The three-dimensional morphology of ablated diamond microgrooves by a picosecond laser at 2.23 J/cm2 energy density
Fig. 4. Picosecond laser ablation of the internal micro-topography of diamond microgrooves （laser energy density is 3.65 J/cm2）
Fig. 5. The relationship between the width and depth of the diamond microgrooves and the pulse energy
Fig. 6. Diamond ablation threshold fitting curve
Fig. 7. The relationship between the ablation rate of picosecond laser processing diamond and the laser energy
Fig. 8. The relationship between the material removal rate of the picosecond laser ablated diamond and the laser energy
Fig. 9. Raman spectra of different positions of diamond microgrooves ablated by picosecond laser
Fig. 10. Raman spectra of picosecond laser ablation at the center of diamond microgrooves under different laser energy
Fig. 11. Finite element simulation model
Fig. 12. Temperature distribution of single-pulse picosecond laser ablation of diamond under different laser energy
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Table 1. Picosecond laser processing diamond experimental parameters
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Table 2. Physical properties of single crystal diamond［27］
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