Simulation of Discharge Shock Waves in Excimer Laser

Liu Bin; Ding Jinbin; Zhou Yi; Jiang Rui; Wang Yu

doi:10.3788/CJL202047.0901001

Journals >Chinese Journal of Lasers >Volume 47 >Issue 9 >Page 901001 > Article

Chinese Journal of Lasers
Vol. 47, Issue 9, 901001 (2020)

Simulation of Discharge Shock Waves in Excimer Laser

Liu Bin^1、2、3, Ding Jinbin^1、3, Zhou Yi^1、3, Jiang Rui^1、3, and Wang Yu^1、2

Author Affiliations

¹Opto-Electronic Technology Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Beijing RSLaser Opto-Electronics Technology Co., Ltd, Beijing 100176, China

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DOI: 10.3788/CJL202047.0901001 Cite this Article Set citation alerts

Liu Bin, Ding Jinbin, Zhou Yi, Jiang Rui, Wang Yu. Simulation of Discharge Shock Waves in Excimer Laser[J]. Chinese Journal of Lasers, 2020, 47(9): 901001 Copy Citation Text

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Liu Bin, Ding Jinbin, Zhou Yi, Jiang Rui, Wang Yu. Simulation of Discharge Shock Waves in Excimer Laser[J]. Chinese Journal of Lasers, 2020, 47(9): 901001

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