[1] ZIAD W A, MOHAMED M. Design and analysis of SAW gas sensor utilizing AlN/Diamond/Si multilayered structure for VOCs detection［J］. Journal of Electronic Materials,2024,53(9):5255-5264.

[2] ZHOUL, HU Z, WANG P, et al. Enhanced NO2 sensitivity of SnO2 SAW gas sensors by facet engineering［J］. Sensors and Actuators B: Chemical, 2022, 361: 131735.

[3] WENG H, DUAN F L, ZHANG Y, et al. High temperature SAW sensors on LiNbO3 substrate with SiO2 passivation layer［J］. IEEE Sensors Journal, 2019, 19(24): 11814-11818.

[4] LAMANNA L, RIZZI F, BHETHANABOTLA V R, et al. GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate［J］. Sensors and Actuators A: Physical, 2020, 315: 112268.

[5] YANG Yuntao, PENG Bin, SUN Zhaofeng, et al. Highly sensitive SAW pressure sensor based on simply supported beam［C］∥Dalian, China: 2023 4th International Conference on Electrical, Electronic Information and Communication Engineering,2023.