Jing Zhang, Haicheng Liu, Xiuhua Fu, Shengqi Wang, Yibo Wang, Junqi Liu, Tianxiang Zhang, Fei Yang, Gang Li. Development of LWDM Narrow‑Band Filter Membrane for 5G Communication[J]. Chinese Journal of Lasers, 2023, 50(19): 1903101
- Chinese Journal of Lasers
- Vol. 50, Issue 19, 1903101 (2023)
Fig. 1. F-P film structure diagram
Fig. 2. Optical constant curves of two materials. (a) SiO2; (b) Ta2O5
Fig. 3. Design curve of the film system
Fig. 4. Structure diagram of optical film thickness monitoring system
Fig. 5. SiO2 film monitoring curve
Fig. 6. Surface roughness changes before and after coating at different rates. (a) Ta2O5; (b) SiO2
Fig. 7. Variations of film surface roughness under different ion source energies. (a) Ta2O5; (b) SiO2
Fig. 8. Test spectral curve of the filter film
Fig. 9. Spectral curve of 44-layer dual-chamber membrane system
Fig. 10. Influence of thickness change of Ta2O5 on spectral curve of the film system. (a) Relative thikness of Ta2O5 is 0.9; (b) relative thickness of Ta2O5 is 0.95; (c) relative thickness of Ta2O5 is 1.05; (d) relative thickness of Ta2O5 is 1.1
Fig. 11. Influence of SiO2 thickness change on spectral curve of the film system. (a) Relative thickness of SiO2 is 0.9; (b) relative thickness of SiO2 is 0.95; (c) relative thickness of SiO2 is 1.05; (d) relative thickness of SiO2 is 1.1
Fig. 12. Debugging flow chart
Fig. 13. Relative sensitivity of each film layer in the film system
Fig. 14. Spectral curve after improvement
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Table 1. Technical requirements for optical communication filter films
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Table 2. Ion source parameters
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Table 3. Process parameters of two materials
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