Three metal membranes of stainless, Al and Cu with thickness of 10～50 μm are selected and processed by femtosecond (fs) laser to fabricate arrayed micro holes. The relationships between micro hole diameter and laser microprocessing parameter have been researched in detailes. The experimental results of laser drilling of stainless, Cu and Al have been examined. It is shown that the diameters of micro hole are increased with single pulse energy and pulse number. Stainless is available for fs laser micro drilling of metal filtration membrane. The straight arrayed structure micro holes with diameters of 2.5～10 μm and spaces of 10～50 μm have been achieved in stainless of depth of 25 μm. Comparing with traditional sintered metal porous membrane, the fs laser microprocessing metal filtration membrane has some excellences in uniform hole diameter, straight and arrayed hole, adjustable size and space of holes, and it is benefited to increase the hole area rates in the membrane and improve the permeated water flux.