• INFRARED
  • Vol. 42, Issue 11, 1 (2021)
Yu-nong HU*, Wei-rong XING, Ming LIU, Peng ZHOU, Zhen LI, and Chen SHEN
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1672-8785.2021.11.001 Cite this Article
    HU Yu-nong, XING Wei-rong, LIU Ming, ZHOU Peng, LI Zhen, SHEN Chen. Research on Optimization of Molecular Beam Epitaxy Process of Long-Wave Type-II Superlattice on 3-in Substrates[J]. INFRARED, 2021, 42(11): 1 Copy Citation Text show less
    References

    [1] Rogalski A. New Material Systems for Third Generation Infrared Photodetectors[J]. OptoElectronics Review, 2008, 16(4): 458482.

    [3] Ting D Z-Y, Soibel A, Hglund L, et al. Type-II Superlattice Infrared Detectors[M]//Gunapala S D.Advances in Infrared Photodetectors. Amsterdam: Elesvier, 2011.

    [4] Razeghi M. Overview of Antimonide Based III-V Semiconductor Epitaxial Layers and Their Applications at the Center for Quantum Devices[J]. European Physica Journal-Applied Physics, 2003, 23(3): 149205.

    [5] Manurkar P, Ramezani-Darvish S, Nguyen B-M, et al. High Performance Long Wavelength Infrared Mega-pixel Focal Plane Array Based on Type-II Superlattices[J]. Applied Physics Letter, 2010, 97: 193505.

    [6] Dutta P S, Bhat H L, Kumar V. The Physics and Technology of Gallium Antimonide: An Emerging Optoelectronic material[J]. Journal of Applied Physics, 1997, 81(9): 58215870.

    [7] Furlong M J, Martinez R, Amirhaghi S, et al. Antimonide Based Infrared Materials: Developments in InSb and GaSb Substrate Technologies;;[C]. Takamatsu: 22nd International Conference on Indium Phosphide and Related Materials (IPRM): 2010.

    [8] Furlong M J, Martinez R, Amirhaghi S, et al. Epitaxy Ready 4" GaSb Substrates: Requirements for MBE Grown Type-II Superlattice Infrared Detectors[C]. SPIE, 2010, 7660: 76601K.

    [9] Furlong M J, Martinez R, Amirhaghi S, et al. Multiwafer Production of Epitaxy Ready 4" GaSb Substrates: Requirements for Epitaxially Growth Infrared Detectors[C]. SPIE, 2012, 8268: 826818.

    [10] Allen L P, Flint J P, Meschew G, et al.100 mm Diameter GaSb Substrates with Extended IR Wavelength for Advanced Space Based Applications[C]. SPIE, 2011, 8012: 801215.

    [14] Jackson E M, Boishin E I, Aifer E H, et al. Arsenic Cross-contamination in GaSb/InAs Superlattices[J]. Journal of Crystal Growth, 2004, 270: 301308.

    [15] Hu Y N, Tam M C, Wasilewski Z R. Unintentional As Incorporation into AlSb and Interfacial Layers within InAs/AlSb Superlattices[J]. Journal of Vacuum Science & Technology B, 2019, 37(3): 032902.

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    HU Yu-nong, XING Wei-rong, LIU Ming, ZHOU Peng, LI Zhen, SHEN Chen. Research on Optimization of Molecular Beam Epitaxy Process of Long-Wave Type-II Superlattice on 3-in Substrates[J]. INFRARED, 2021, 42(11): 1
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