• Optical Instruments
  • Vol. 43, Issue 6, 64 (2021)
Tingdi LIAO1、2、3, Shaobin YAN1, Qilu HUANG1、2、3, Yantang HUANG2, and Xudong CUI1
Author Affiliations
  • 1Research Center for Photonics Technology, Quanzhou Normal University, Quanzhou 362000, China
  • 2Fujian Provincial Key Laboratory for Advanced Micro-nano Photonics Technology and Devices, Quanzhou 362000, China
  • 3Fujian Provincial Collaborative Innovation Center for Ultra-Precision Optical Engineering and applications, Quanzhou 362000, China
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    DOI: 10.3969/j.issn.1005-5630.2021.06.011 Cite this Article
    Tingdi LIAO, Shaobin YAN, Qilu HUANG, Yantang HUANG, Xudong CUI. An apparatus for inspecting adjacent surfaces defects of TEC component based on equal-optical-path polarization splitting imaging[J]. Optical Instruments, 2021, 43(6): 64 Copy Citation Text show less

    Abstract

    An apparatus for simultaneously inspecting adjacent surfaces defects of thermoelectric cooler (TEC) components based on polarization beam splitting imaging is proposed. The optical design of the apparatus for simultaneously inspecting adjacent surface defects of TEC components is discussed. The proposed apparatus employs polarization beam splitter and polarization camera and meets the conditions of equal-optical-path imaging for both top and side surfaces. The experimental investigations on defects inspection with equal-optical-path polarization imaging system are conducted. The results indicate that the proposed inspection technique with polarization splitting equal-optical-path imaging is capable of simultaneously inspecting the adjacent surfaces defects and the optical apparatus can well meet the performance requirements for inspecting adjacent surfaces defect of TEC components. The inspection resolution can reach 110 lp/mm when equal-optical-path confocal imaging is met, but the inspection resolution reduces to below 45 lp/mm when the defocus is around ±0.20mm. It was noted that the developed technique has obvious advantages of rather good imaging quality, easy adjustment of imaging system, simplified and reliable optical configurations , and improved defect inspection performance.
    Tingdi LIAO, Shaobin YAN, Qilu HUANG, Yantang HUANG, Xudong CUI. An apparatus for inspecting adjacent surfaces defects of TEC component based on equal-optical-path polarization splitting imaging[J]. Optical Instruments, 2021, 43(6): 64
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