Effect of Substrate′s Crystalline Structure on Crystalline and Mechanical Properties of HfO2 Thin Films

Guo Jialu; Liu Xiaofeng; Zhao Yuanan; Shao Jianda; Zhao Jiaoling; Huang Haopeng; Cui Yanyan

doi:10.3788/cjl201643.0603001

Journals >Chinese Journal of Lasers >Volume 43 >Issue 6 >Page 603001 > Article

Chinese Journal of Lasers
Vol. 43, Issue 6, 603001 (2016)

Effect of Substrate′s Crystalline Structure on Crystalline and Mechanical Properties of HfO₂ Thin Films

Guo Jialu^1、2、*, Liu Xiaofeng¹, Zhao Yuanan¹, Shao Jianda¹, Zhao Jiaoling^1、2, Huang Haopeng^1、2, and Cui Yanyan^1、2

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: 10.3788/cjl201643.0603001 Cite this Article Set citation alerts

Guo Jialu, Liu Xiaofeng, Zhao Yuanan, Shao Jianda, Zhao Jiaoling, Huang Haopeng, Cui Yanyan. Effect of Substrate′s Crystalline Structure on Crystalline and Mechanical Properties of HfO₂ Thin Films[J]. Chinese Journal of Lasers, 2016, 43(6): 603001 Copy Citation Text

show less

Cited By

Article index updated: Jun. 3, 2024

Citation counts are provided from Researching.

The article is cited by 2 article(s) from Researching.