Grazing exit X-ray fluorescence spectrometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 10 >Issue 6 >Page 597 > Article

Optics and Precision Engineering
Vol. 10, Issue 6, 597 (2002)

Grazing exit X-ray fluorescence spectrometer

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Grazing exit X-ray fluorescence spectrometer[J]. Optics and Precision Engineering, 2002, 10(6): 597 Copy Citation Text

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References

[2] Spiller E. Experience with the in situ monitor system for fabrication of X-ray mirrors[J]. SPIE, 1985,563: 367-375.

[3] Per S, Galnnder B,Nyberg T, et al. Probe depth variation in grazing exit soft-X-ray emission spectroscopy[J]. Nucl. Instr. and Meth. in Phys. Res. 1997,A384:558-562.

[4] Terada S, Murakami H, Nishihagi K.Thickness and composition measurement for thin film with combined X-ray technique[A].1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference[C]. 1999,414-419.

[7] Claes M,Grieken R V.Comparision of grazing emission XRF with total reflection XRF and other X-ray emission techniques[J].X-ray Spectrom 1997,26:153-158.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Grazing exit X-ray fluorescence spectrometer[J]. Optics and Precision Engineering, 2002, 10(6): 597

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