By using the thermoelastic model, the finite element analysis of dispensing process of optical slices is performed. The process parameters which influence the surface deformation of workpieces (Δp) after dispensing are optimized. For an optical slice with a diameter of 100 mm and a thickness of 2 mm, a thin base plate with high elastic modulus and low thermal expansion coefficient is the optimal selection. Δp decreases with the decreases of radius, number and elastic modulus of glue dots. The glue dot position should avoid the high Δp zones. The thermal expansion coefficient of glue dots has little influence on Δp.