[2] GONCALVES L M, ROCHA J M, COUTO C, et al. On-chip array of thermoelectric peltier microcoolers［J］. Sensors and Actuators A, 2008, 4(5): 75-80.

[3] SHANK S M, SOAVE J, THEN A M, et al. Fabrication of high aspect ratio structures for microchannel plates［J］. J Vac Sci Technol, 1995, B13(6): 2736-2740.

[4] YAN Jin-liang. Operating effectiveness of electron transmission film at the input of MCP［J］. Acta Photonica Sinica, 2004, 33(2): 164-166.

[5] YANG Wen-zheng, TIAN Jin-shou. Spatially resolved research of picosecond x-ray multiframes camera with gated microchannel plate［J］. Acta Photonica Sinica, 2007, 36(12): 2201-2214.

[6] SUN Zhong-wen. Effect of acid etching on electrical performances of microchannel plat［J］. Appl Opt, 2008, 29(2): 161-165.

[7] JU Li. The design of blazed silicon grating by deflecting crystal orientation (111)silicon wafer［J］. Acta Photonica Sinica, 2004, 33(6): 755-757.

[8] CI Peng-liang, JING Shi, WANG Fei, et al. Novel thermoelectric materials based on boron-doped silicon microchannel plates［J］. Materials Letters, 2011, 65(2011): 618-1620.

[10] GAO Yan-jun, DUANMU Qing-duo, WANG Guo-zheng. Formation of a silicon micropore array of a two-dimension electron multiplier by photo electrochemical etching［J］. Journal of Semiconductors, 2009, 30(2): 022001.

[11] ZHENG W H, REECE P, SUN B Q, et al. Broadband laser mirrors made from porous silicon［J］. Appl Phys Lett, 2004, (84): 3519-3521.

[13] ZHAO Zhi-gang, BAI Cai-li, GUO Jin-chuan, et al. Fabrication of wall array by electrochemical etching of n-type silicon［C］. SPIE, 2007, 6836: 68360W-1-68360W-5.