Analyses of the structure and Interfaces of Multilayer UsingHigh-resolution Transmission Electron Microscopy

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 21 >Issue 6 >Page 457 > Article

Chinese Journal of Lasers
Vol. 21, Issue 6, 457 (1994)

Analyses of the structure and Interfaces of Multilayer UsingHigh-resolution Transmission Electron Microscopy

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analyses of the structure and Interfaces of Multilayer UsingHigh-resolution Transmission Electron Microscopy[J]. Chinese Journal of Lasers, 1994, 21(6): 457 Copy Citation Text

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Abstract

The structure of a Mo/Si multilayer fabricated with planiar magnetron sputtering has been inveStigated by using SAXD and HRTEM techniques. The FC-digital image processing syStem, which can easily give us the digital results of the structure parameters of multilayer, has been induced in analyses of HRTEM.

Keywords

FC-digital image process transmission electron microscope multilayer

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