Micromechanical high-Q resonator based on hybrid cavity

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 49 > Article

Optics and Precision Engineering
Vol. 12, Issue z1, 49 (2004)

Micromechanical high-Q resonator based on hybrid cavity

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Micromechanical high-Q resonator based on hybrid cavity[J]. Optics and Precision Engineering, 2004, 12(z1): 49 Copy Citation Text

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References

[1] KWEON Y. RF-MEMS and applications[J]. Microwave Journal, 2002, (3): 4-48.

[4] Blondy P, Brown A, Cros D, et al. Low-loss micromachined filters for mm-wave telecommunication systems[J].IEEE IMS Digest, 1998: 1181-1184.

[5] PAPAPOLYMEROU J, CHENG J, EAST J, et al. A micromachined high-Q X-band resonator[J]. IEEE Microw. & Guided Wave Letters, 1997,7(6): 168-170.

[6] GUILLON B. Design and realization of high-Q mm-wave structures through micromachining techniques[J]. IEEE IMS Digest, 1999: 1519-1522.

[9] SCHNIEDER F, HEINRICH W. Model of thin-film microstrip line for circuit design[J]. IEEE Trans. Microwave Theory Tech., 2001, 49(1): 104-110.

[in Chinese], [in Chinese], [in Chinese]. Micromechanical high-Q resonator based on hybrid cavity[J]. Optics and Precision Engineering, 2004, 12(z1): 49

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