1.55-μm Si-based MOEMS optical tunable filter

Yuhua Zuo; Changjun Huang; Buwen Cheng; Xiao Cai; Rongwei Mao; Chuanbo Li; Liping Luo; Junhua Gao; Yunxia Bai; Lei Jiang; Chaohua Ma; Jialian Zhu; Liangchen Wang; Jinzhong Yu; Qiming Wang

Journals >Chinese Optics Letters >Volume 1 >Issue 9 >Page 09529 > Article

Chinese Optics Letters
Vol. 1, Issue 9, 09529 (2003)

1.55-μm Si-based MOEMS optical tunable filter

Yuhua Zuo^*, Changjun Huang, Buwen Cheng, Xiao Cai, Rongwei Mao, Chuanbo Li, Liping Luo, Junhua Gao, Yunxia Bai, Lei Jiang, Chaohua Ma, Jialian Zhu, Liangchen Wang, Jinzhong Yu, and Qiming Wang

Author Affiliations

State Key Joint Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083

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Yuhua Zuo, Changjun Huang, Buwen Cheng, Xiao Cai, Rongwei Mao, Chuanbo Li, Liping Luo, Junhua Gao, Yunxia Bai, Lei Jiang, Chaohua Ma, Jialian Zhu, Liangchen Wang, Jinzhong Yu, Qiming Wang. 1.55-μm Si-based MOEMS optical tunable filter[J]. Chinese Optics Letters, 2003, 1(9): 09529 Copy Citation Text

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References

[1] D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

[2] P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

[3] F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

[4] C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).

[5] A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

CLP Journals

[1] Guan Baolu, Guo Xia, Gu Xiaoling, Yang Hao, Deng Jun, Gao Guo, Shen Guangdi. Characteristic of Micro-Opto-Electro-Mechanical System-Cantilever of Tunable Micro-Cavity Light Emitting Diodes[J]. Chinese Journal of Lasers, 2008, 35(2): 245

[2] [in Chinese], [in Chinese], [in Chinese], [in Chinese]. 4×4 Crossbar Micro-Electro-Mechanical System Optical Matrix Switches[J]. Chinese Journal of Lasers, 2005, 32(7): 937

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